Optical coherence tomography for process control of laser micromachining

Markus Wiesner; Jürgen Ihlemann; Heike H. Müller; Eva Lankenau; Gereon Hüttmann

doi:10.1063/1.3356080

Optical coherence tomography for process control of laser micromachining

Markus Wiesner^*, Jürgen Ihlemann, Heike H. Müller, Eva Lankenau, Gereon Hüttmann

^*Corresponding author for this work

Institute of Biomedical Optics

Laser-Laboratorium Göttingen E.V.

48 Citations (Scopus)

Abstract

In situ surface imaging for nondestructive evaluation (NDE) by optical coherence tomography (OCT) before, during, and after ablative laser processing is presented. Furthermore, it is shown that the ability of in situ characterization is beneficial for samples such as optical fibers, which are difficult to handle in the standard analysis. Surface images taken by the OCT are compared with these common analysis tools such as scanning electron microscopy (SEM), reflected-light, and confocal microscopy. An axial resolution of ∼126 nm for surface detection and a lateral resolution <2.5 μm are obtained and the potential of the setup to imaging structures with high aspect ratio is demonstrated.

Original language	English
Article number	033705
Journal	Review of Scientific Instruments
Volume	81
Issue number	3
ISSN	0034-6748
DOIs	https://doi.org/10.1063/1.3356080
Publication status	Published - 14.04.2010

Funding

We would like to thank Jörg Meinertz, Tim Bonin and the Thorlabs HL AG for useful discussions and Markus Sailer for skilled SEM and confocal microscopy measurements. Financial support by the German Federal Ministry of Economics and Technology is gratefully acknowledged (Grant No. 16IN0351).

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AU - Hüttmann, Gereon

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Optical coherence tomography for process control of laser micromachining

Abstract

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UN SDGs

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