Optical coherence tomography for process control of laser micromachining

Markus Wiesner*, Jürgen Ihlemann, Heike H. Müller, Eva Lankenau, Gereon Hüttmann

*Corresponding author for this work
21 Citations (Scopus)


In situ surface imaging for nondestructive evaluation (NDE) by optical coherence tomography (OCT) before, during, and after ablative laser processing is presented. Furthermore, it is shown that the ability of in situ characterization is beneficial for samples such as optical fibers, which are difficult to handle in the standard analysis. Surface images taken by the OCT are compared with these common analysis tools such as scanning electron microscopy (SEM), reflected-light, and confocal microscopy. An axial resolution of ∼126 nm for surface detection and a lateral resolution <2.5 μm are obtained and the potential of the setup to imaging structures with high aspect ratio is demonstrated.

Original languageEnglish
Article number033705
JournalReview of Scientific Instruments
Issue number3
Publication statusPublished - 14.04.2010


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