TY - JOUR
T1 - A neural probe process enabling variable electrode configurations
AU - Kindlundh, Maria
AU - Norlin, Peter
AU - Hofmann, Ulrich G.
PY - 2004/9/1
Y1 - 2004/9/1
N2 - Up till now, silicon neural probes have been produced using fixed lithographic mask sets, which is straightforward but inflexible and costly with respect to redesigns for small production volumes. We demonstrate a method to vary the recording site distribution on neural probes with a maskless finishing process. The concept is based on the use of direct write laser lithography (DWL) in one mask layer, thus, enabling on-demand processing of wafers with semi-custom designs at a reasonable cost and lead time. We use the DWL to define windows in the top isolation layer of the device, thus, selecting which electrodes, out of a standardised electrode array, should be active. In addition the active electrode area can be varied. The concept is evaluated using a 64-site neural probe design and manufacturing process. Impedance characterisation is made on active and inactive electrodes and on electrodes with varying active area. The results show ∼15 times lower impedance for active compared to inactive electrodes at 1kHz, which is considered sufficient for signal discrimination.
AB - Up till now, silicon neural probes have been produced using fixed lithographic mask sets, which is straightforward but inflexible and costly with respect to redesigns for small production volumes. We demonstrate a method to vary the recording site distribution on neural probes with a maskless finishing process. The concept is based on the use of direct write laser lithography (DWL) in one mask layer, thus, enabling on-demand processing of wafers with semi-custom designs at a reasonable cost and lead time. We use the DWL to define windows in the top isolation layer of the device, thus, selecting which electrodes, out of a standardised electrode array, should be active. In addition the active electrode area can be varied. The concept is evaluated using a 64-site neural probe design and manufacturing process. Impedance characterisation is made on active and inactive electrodes and on electrodes with varying active area. The results show ∼15 times lower impedance for active compared to inactive electrodes at 1kHz, which is considered sufficient for signal discrimination.
UR - http://www.scopus.com/inward/record.url?scp=4344648964&partnerID=8YFLogxK
U2 - 10.1016/j.snb.2003.10.009
DO - 10.1016/j.snb.2003.10.009
M3 - Journal articles
AN - SCOPUS:4344648964
SN - 0925-4005
VL - 102
SP - 51
EP - 58
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
IS - 1
ER -